| 摘要 |
PROBLEM TO BE SOLVED: To provide a movable scale device capable of constituting the biaxial table of X-Y in flat structure. SOLUTION: An X-Y table 400, into which an X-axis table 200 and a Y-axis table 300 are incorporated in plane structure, is arranged onto a base member 100, and the movement of the X-axis table 200 and the Y-axis table 300 is controlled by an X-axis driving unit 500 and a Y-axis driving unit 600 disposed onto the base member 100 in plane structure. Magnetic bodies with comb-tooth surfaces are arranged oppositely in each driving unit and each table, and reluctance is changed by the variation of a magnetic gap between the comb-tooth surfaces of each magnetic body by switching electric conduction through a driving coil, and each table is thrust. A detector detecting the places of each table is installed, detecting signals are fed back, and electric conduction through the driving coil is controlled. |
