| 摘要 |
<p>PROBLEM TO BE SOLVED: To uniformly polarize by providing a process, in which a recess of a piezoelectric member of ununiform thickness with a recess on the surface thereof is filled with a filler of a dielectric constant almost equal to that of the piezoelectric member, to uniform the thickness, and an electrode is formed on surfaces, which are vertical to the thickness direction and face each other, to polarize. SOLUTION: Using BaTiO3 as a piezoelectric material, a piezoelectric material which is periodically provided with recesses on its surface is formed using a metal mold. As the periodical recess preferably, the depth is 100-600μm, a width is 10-200μm, and a pitch is 50-300μm. The recess of the piezoelectric material 1 is filled with a filler 2 of a dielectric constant almost equal to that of the piezoelectric member, to uniform the thickness. As the filler, a dielectric constant of BaTiO3 is, for example, 1600 at room temperature. An electrode 3 is formed by printing using silver paste. The piezoelectric member is polarized for about 1-100 minutes under a condition of the temperature about 80-120 deg.C and 2-5 kv/mm. In this way the piezoelectric material of non-uniform thickness with a recess on its surface is uniformly polarized.</p> |
