发明名称 MANUFACTURE OF BGA SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which can increase the reliability of elastomers formed between semiconductor chips and a TAB tape with low costs and a good appearance. SOLUTION: The method for manufacturing a ball grid array (BGA) type semiconductor device includes a step of mounting semiconductor chips on an insulating film having a plurality of wiring patterns arranged as spaced by predetermined intervals. The chip mounting step further includes a step of preparing a mold plate 20 having recesses H having a desired shape at a position where the chips are to be mounted on the insulating film and filling elastomers 4 in the recesses H of the mold plate 20, a step of subjecting the elastomers 4 to a defoaming process, a step of positioning and bonding the insulating film, a step of heating and curing the elastomers 4, a step of dismounting the mold plate 20, and a bonding step of fixedly mounting the semiconductor chips on the elastomers 4.
申请公布号 JPH10270493(A) 申请公布日期 1998.10.09
申请号 JP19960303212 申请日期 1996.11.14
申请人 MITSUI HIGH TEC INC 发明人 AMANO KATSUMI
分类号 H01L21/60;H01L23/12;(IPC1-7):H01L21/60 主分类号 H01L21/60
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