| 摘要 |
PROBLEM TO BE SOLVED: To quickly eliminate the charging of a glass substrate so as to facilitate peeling-off by supplying ionized dry air or dry nitrogen gas from the absorbing groove of the surface of a heating part when the heat treated glass substrate is raised by a vertical moving pin and peeled off from the heating part. SOLUTION: An adsorbing groove 6 provided in the surface of the flat plate- like heating part 2 of a hot plate 1 for heating is evacuated by an exhaust means 11, and a glass board 4 is adhered to the surface of the heating part and uniformly heated by a heater 7. After specified heating treatment is finished, the evacuation of the adsorbing groove 6 is stopped, dry air or dry nitrogen gas is supplied from a gas supply pipe 12 to the adsorbing groove 6 by the operation of a switch valve 10, and the glass substrate 4 is raised by a vertical moving pin 5. At this time, the dry air or the like is ionized by using an ionizing means 20 and supplied to the back of the glass substrate 4, and the charging of the glass substrate 4 is eliminated. Thus, even for the thin glass substrate 4, it is easily peeled off from the heating part 2. |
