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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH10270568(A)
申请公布日期
1998.10.09
申请号
JP19970071645
申请日期
1997.03.25
申请人
MITSUBISHI ELECTRIC CORP
发明人
SHIRATAKE SHIGERU
分类号
H01L21/8238;H01L21/8234;H01L27/092;H01L27/105;(IPC1-7):H01L21/823
主分类号
H01L21/8238
代理机构
代理人
主权项
地址
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