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发明名称
CARRIER FOR SEMICONDUCTOR WAFER
摘要
申请公布号
JPH10270541(A)
申请公布日期
1998.10.09
申请号
JP19970069730
申请日期
1997.03.24
申请人
NEC KYUSHU LTD
发明人
KOYANAGI TAKUYA
分类号
H01L21/673;H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/673
代理机构
代理人
主权项
地址
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