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发明名称
SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要
申请公布号
JPH10270439(A)
申请公布日期
1998.10.09
申请号
JP19970075756
申请日期
1997.03.27
申请人
MITSUBISHI ELECTRIC CORP;RYODEN SEMICONDUCTOR SYST ENG KK
发明人
SHO YASUSHI;NISHIMURA TSUNEYUKI;UTATSU TAKASHIGE;AKAI HIROYUKI;SHOJI KEITA
分类号
H01L21/31;H01L21/316;(IPC1-7):H01L21/316
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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