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发明名称
OPTICAL DEVICE AND PARTICLE BEAM DEVICE
摘要
申请公布号
JPH10268096(A)
申请公布日期
1998.10.09
申请号
JP19970300741
申请日期
1997.10.31
申请人
ACT ADVANCED CIRCUIT TESTING G FUER TESTSYSTEMENTWICKLUNG MBH
发明人
FROSIEN JUERGEN DR;LANIO STEFAN DR;SCHMITT REINHOLD;SCHOENECKER GERALD DR
分类号
G21K1/087;H01J37/12;(IPC1-7):G21K1/087
主分类号
G21K1/087
代理机构
代理人
主权项
地址
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