Mit hoher Genauigkeit bewegliche Plattform

摘要

A precision positioning stage assembly (10), comprising a movable stage (12), a drive screw (14) having it axis parallel to the direction of movement of the stage (12), a follower (18) threadably engaged with the drive screw (14), and a linear guide rail (24) for supporting one side of the stage (12). The linear guide rail (24) having its axis parallel to the direction of movement of the stage (12). A drive member is secured to the stage (12) which has a pair of oppositely disposed contact surfaces (51,53) spaced apart a predetermined distance. A torque member (28) is secured to the follower (18), the torque member (28) having a drive section (32) for placement between the contact surfaces (51,53) and moving the stage (12) along the guide rail. The drive section (32) and the contact surfaces (51,53) having an configuration so as to provide substantially point contact therebetween.