| 摘要 |
<p>A display, such as a liquid crystal display, wherein a first hexagonal titanium nitride film (14) is interposed between a drain region (5) made from a polycrystalline silicon film and a drain electrode (9) made from an aluminum film for preventing the diffusion of silicon with the purpose of connecting electrodes, wiring, etc., at low resistances, while a second hexagonal titanium nitride film (15) which can be formed by sputtering from the same target as that of a titanium film (13) and the first titanium nitride film (14) is interposed between a transparent display electrode (12) made from an ITO film (9) and the drain electrode (9) made from the aluminum film so as to connect the electrodes (12 and 9) to each other ohmically. Since the second titanium nitride film (15) has a resistance to the etchant used for etching a silicon oxide film and another etchant used for etching the ITO film, the film (15) protects the drain electrode (9) during etching of the silicon oxide film and ITO film.</p> |
