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发明名称
摘要
申请公布号
JP2809196(B2)
申请公布日期
1998.10.08
申请号
JP19960137144
申请日期
1996.05.30
申请人
NIPPON DENKI KK
发明人
MIKAGI IKU
分类号
H01L21/28;H01L21/3205;H01L23/52;(IPC1-7):H01L21/320
主分类号
H01L21/28
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代理人
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