发明名称 CAPACITOR STRUCTURE
摘要 The invention relates to a capacitor structure. According to the invention, a plurality of blind holes is provided in a first electrically conductive layer, said blind holes extending from a first main surface of said first electrically conductive layer. The inside walls of the blind holes are provided with a dielectric layer, a second electrically conductive layer being arranged on said dielectric layer. The edge area of the capacitor is covered by an insulating layer and the second electrically conductive layer is provided with a multi-layer contact metallic coating.
申请公布号 WO9844522(A2) 申请公布日期 1998.10.08
申请号 WO1998DE00817 申请日期 1998.03.19
申请人 SIEMENS AKTIENGESELLSCHAFT;LOSEHAND, REINHARD 发明人 LOSEHAND, REINHARD
分类号 H01L29/94 主分类号 H01L29/94
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