Bauteil aus Quarzglas für die Verwendung bei der Halbleiterherstellung

摘要

The invention relates to a known quartz glass component which is used to produce a semiconductor. Said component comprises a rough surface which is formed by irregular raised structural elements extending from a first higher plane and a second lower plane. A plurality of structural elements have a substantially even covering surface extending on the first plane. Said surface is defined on all sides by facet-like, substantially even side surfaces running between the first and second plane. The invention provides a quartz glass component with long service life which is particularly suitable for CVD coating adhesion. According to the invention, the average surface roughness of surface Ra lies between 0.1 mu m and 10 mu m and the size of the projection of the structural elements on the first plane ranges, on average, between 30 mu m and 180 mu m.