发明名称 PARTICLE MANIPULATION
摘要 The invention relates to a method for manipulating particles which are in a plasma crystalline state in a plasma of a carrier gas. According to the method, the particles are subjected at least partly to a plasma treatment and/or applied to the surface of a substrate. A device for manipulating particles in the plasma crystalline state comprises a reaction vessel in which plasma electrodes and at least one substrate are placed. The invention provides an adaptive electrode for creating a low frequency or static electric field at selected sites in the reaction vessel.
申请公布号 WO9844766(A2) 申请公布日期 1998.10.08
申请号 WO1998EP01938 申请日期 1998.04.02
申请人 MAX-PLANCK-GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN E.V.;KAYSER-THREDE GMBH;MORFILL, GREGOR;THOMAS, HUBERTUS;STUFFLER, TIMO 发明人 MORFILL, GREGOR;THOMAS, HUBERTUS;STUFFLER, TIMO
分类号 H05H1/46;H05H3/04 主分类号 H05H1/46
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