THIN-FILM THERMOELECTRIC DEVICE AND FABRICATION METHOD OF SAME

摘要

A thermoelectric thin-film device and method of manufacturing the device. The thermoelectric device includes a plurality of N- and P-type thermoelements connected in series using heat-spreading headers (30). The thermoelements may consist of superlattice or non-superlattice materials. The device can be manufactured with a high utilisation efficiency and high cooling/packing density. It is also scalable to a variety of heat loads and can be manufactured in large area.