发明名称 Plate substrate semi-finished product with both surfaces ground
摘要 The product includes local curves of the grinding process, produced on each plane of the plate substrate semi-finished product, of radial type extending from the centre outwards. The product is formed by sequential grinding of both planes of a plate substrate material (30) in successive operations with identical working. When each plane of the plate substrate material is ground by a rotary grinding stone (2), the latter grinding grains are broken out, or fall out in a first step grinding most of a preset portion. During this step the plate substrate material is secured on a work bench, which together with the grinding stone is rotated. Each plane is ground, with the r.p.m. of the bench lying in a region of 60-80, or 20-40 % of those of the grinding stone.
申请公布号 DE19813464(A1) 申请公布日期 1998.10.08
申请号 DE19981013464 申请日期 1998.03.26
申请人 NGK INSULATORS, LTD., NAGOYA, AICHI, JP 发明人 NAITO, TSUTOMU, KASUGAI, AICHI, JP
分类号 B24B7/04;B24B7/22;B24B7/24;(IPC1-7):H01L21/00 主分类号 B24B7/04
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