Method of etching a semiconductor device,申请号GB19980006935-传众专利搜索

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发明名称	Method of etching a semiconductor device
摘要
申请公布号	GB2323967(A)	申请公布日期	1998.10.07
申请号	GB19980006935	申请日期	1998.03.31
申请人	* NEC CORPORATION	发明人	AKIRA * MITSUIKI
分类号	H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/321;H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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