| 摘要 |
The invention provides a small-sized and high-sensitivity three-axis sensor capable of three-dimensionally detecting a physical quantity using a single sensor unit. The three-axis sensor comprises an operating member (31), a supporting base (32) having a hollow and disposed around the operating member located at the center of the hollow; and a flexible plate (34) having a piece of piezoelectric material (35) in contact with at least one pair of electrodes and extending across the hollow at an end of the supporting base. The operating member is suspended at the center of the hollow by the flexible plate. The flexible plate is deformed in response to the behavior of the operating member corresponding to a physical quantity applied from the outside, and the piece of piezoelectric material generates a charge corresponding to the deformation of the flexible plate thereby three-dimensionally detecting the magnitude and the direction of the physical quantity. In the three-axis sensor, the flexible plate has a portion relatively weak in mechanical strength compared to the other portion, and a piezoelectric sensor element is disposed on the relatively weak portion so that the deformation of the flexible plate is concentrated in the portion where the piezoelectric sensor element is disposed. <IMAGE> |
