发明名称 Projection optical system
摘要 <p>A projection optical system including a first lens group G1 having positive power; a second lens group G2 having negative power; and a third lens group G3 having positive power wherein the lens elements in each of the lens groups are composed of glass materials selected from the group consisting of fluorite and quartz. Also, the projection optical system satisfies the following condition: &lt;MATH&gt; &lt;MATH&gt; &lt;MATH&gt; where: L: distance between an objective plane and an image plane f: focal length of the entire system f3: focal length of the third lens group G3 f3C: composite focal length of fluorite lens elements which are included in the third lens group G3. &lt;IMAGE&gt;</p>
申请公布号 EP0869382(A2) 申请公布日期 1998.10.07
申请号 EP19980106068 申请日期 1998.04.02
申请人 NIKON CORPORATION 发明人 KUDO, SHINTARO
分类号 G02B13/24;G02B9/12;G02B13/00;G03F7/20;H01L21/027;(IPC1-7):G02B13/00 主分类号 G02B13/24
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