| 摘要 |
PROBLEM TO BE SOLVED: To obtain the subject new compound useful as a more sensitive and high resolution resist material. SOLUTION: This high molecular compound having 1,000-500,000 weight average molecular weight has a repeating unit of the formula [R<1> is H or methyl; R<2> is a 1-8C alkyl; R<3> is H; R<4> is COOR<5> (R<5> is H, etc.); (x) is 0 or a positive integer; (y) is a positive integer; (p) and (q) are each a positive number; etc.], in which a part of hydrogen atoms of a phenolic hydroxyl group and/or a carboxyl group is partially substituted with one or more kinds of an acid unstable group, and a part of the remaining phenolic hydroxyl group and/or carboxyl group reacts with an alkenyl compound or a halogenated alkyl ether compound to form intramolecular and/or intermolecular C-O-C group and to crosslink the compounds with the formed intramolecular and/or intermolecular C-O-C group, and includes average 0-80 mol.% total amount of the acid unstable group and crosslinking group based on the total of the phenolic hydroxyl group of the formula and carboxyl group. |
