SUBSTRATE CARRYING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate carrying device provided with a mechanical- chuck head which is capable of chucking a large sized substrate on a carrier robot and is capable of carrying the substrate to an arbitrary location by inverting the front and back surfaces. SOLUTION: This device has 8 chuck pieces 9a, 9b provided with two steps of chuck parts chucking 4 side surfaces of a substrate 4, chuck operations by the chuck pieces 9a, 9b are performed by a direct driving in which an air cylinder is made a driving source via a slide shaft performing a slide operation, and the slide shaft and the supporting body are freely slidably supported via ball bush.