SINGLE CRYSTAL PULLING UP DEVICE AND PULLING UP METHOD

摘要

PROBLEM TO BE SOLVED: To provide a single crystal pulling up device and pulling up method which surely clamp the constricted part formed below a convergent part and are not limited in the axial length of the single crystal by a clamping means in production of the single crystal by a CZ method. SOLUTION: A crystal clamping jig 30 is hung down via a wire from a pulling up mechanism 1. This crystal clamping jig 30 consists of a box 31 which has apertures to allow the passage of the convergent part 2a, diametrally expanding part 2b and constricted part 2c formed at the bottom end of a seed crystal 5 on both front and rear surfaces and has S-shaped grooves 31a, 31b on the blank and plural clamping rods 32 which are horizontally supported in this box by inserting their both ends into these S-shaped grooves and are rollable along the grooves. The clamping rods held static at the top ends of the grooves are pressed in conntact with the conical surface on the upper side of the diametrally expanding part 2b and move to the bottom ends by descending in the grooves. When the crystal clamping jig 30 is risen, the clamping rods 32 come into contact with the conical surface formed between the diametrally expanding part 2b and the constricted part 2c, thereby clamping the single crystal 2.