发明名称 |
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE |
摘要 |
The invention relates to a method of manufacturing a semiconductor device in which an etching process is used so as to etch regions consisting of AIIIBV compounds selectively relative to each other. According to the invention in the etching process an etching bath is used having a water-dissolved oxidizing material and a reducing material constituting together a redox system. In such an etching bath with redox system the selectivity is established by the choice of the concentrations of the materials and of the pH. |
申请公布号 |
JPS51134576(A) |
申请公布日期 |
1976.11.22 |
申请号 |
JP19760047914 |
申请日期 |
1976.04.28 |
申请人 |
PHILIPS* GLOEILAMPENFABRIEKEN NV |
发明人 |
HADORUFU PAURUSU TEEBURUGU |
分类号 |
H01L21/285;H01L21/306;H01L21/308;H01L33/00 |
主分类号 |
H01L21/285 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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