| 摘要 |
PROBLEM TO BE SOLVED: To position the displacement and inclination of a positioned object minutely and rapidly with high accuracy by controlling a signal and power necessary for driving to minutely displace a rotational displacement table, through a transmitter-receiver that can inputoutput on the fixed part side. SOLUTION: While being rotated, a rotational displacement table 26 positions a positioned object 25 such as a tool, a measuring probe or a workpiece minutely with accuracy in a parallel direction to a rotary shaft of a rotating part 22. At this time, the displacement quantity of the rotational displacement table 26 to move is computed on the basis of a displacement output signal taken into a controller 29 after amplifying by an amplifier 28 for a displacement measuring device through a transmitter-receiver 27. An amplifier 30 for an actuator inputting the result amplifies command voltage and outputs a signal after amplification as supply power to the actuator through the transmitter- receiver 27. The displacement of the rotational displacement table 26 can therefore be positioned minutely with high accuracy. |
