| 摘要 |
PROBLEM TO BE SOLVED: To obtain sliding members stably usable over a long period of time by using a titanium diboride sintered compact contg. a specified amt. of titanium diboride as at least one of sliding members on fixaition and rotation sides and specifying the porosity, average pore diameter and max. pore diameter of the sealing face of the sintered compact. SOLUTION: At least one of sliding members on fixation and rotation sides is made of a titanium diboride sintered compact contg. carbides and borides of Ni and Cr besides >=80 wt.% titanium diboride. The sealing face of the sintered compact has 5-15% porosity, 5-15 μm average pore diameter and <=50 μm max. pore diameter. The sealing face is formed by polishing with a diamond grindstone and lapping with diamond paste of 1 μm. Since titanium diboride has high lubricity and fluid held in the pores acts as a lubricant, attraction is not caused even under conditions of a high PV value (P is hermetically sealing pressure and V is speed of revolution). |
