PROCESSING OF GAS CONTAINING SILANES

摘要

PROBLEM TO BE SOLVED: To inexpensively treat a gas containing silanes to remove or decrease specific silanes in the gas by carrying out a contact of the gas containing the silanes with silanes or disilanes having higher boiling points than the silanes in the gas. SOLUTION: This treatment of the gas containing the silanes expressed by formula (R is an 1-12C monovalent hydrocarbon group; X is a halogen; a and b are each an integer of 0-4 and satisfies a+b=0-4) is made to contact with the silanes having higher boiling point than these silanes or trimethylchlorodisilane, dimethyltetrachlorodisilane, etc., allowing to remove or decrease the silanes in the prescribed gas containing the silanes.