发明名称 |
Continuous preparation of silicon nitride powder |
摘要 |
Silicon nitride powder is continuously prepared by feeding metallic silicon powder into a fluidized bed comprising silicon nitride powder and nitrogen or ammonia gas and discharging a nitrided product from the fluidized bed. The metallic silicon powder is pretreated at a temperature of 1,000 DEG -1,400 DEG C. under a vacuum of 0.001-100 Torr before it is subject to nitriding reaction.
|
申请公布号 |
US5817285(A) |
申请公布日期 |
1998.10.06 |
申请号 |
US19960759378 |
申请日期 |
1996.12.04 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
FUKUOKA, HIROFUMI;KONYA, YOSHIHARU;FUKUHIRA, MASANORI |
分类号 |
C01B21/068;(IPC1-7):C01B21/068 |
主分类号 |
C01B21/068 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|