发明名称 Continuous preparation of silicon nitride powder
摘要 Silicon nitride powder is continuously prepared by feeding metallic silicon powder into a fluidized bed comprising silicon nitride powder and nitrogen or ammonia gas and discharging a nitrided product from the fluidized bed. The metallic silicon powder is pretreated at a temperature of 1,000 DEG -1,400 DEG C. under a vacuum of 0.001-100 Torr before it is subject to nitriding reaction.
申请公布号 US5817285(A) 申请公布日期 1998.10.06
申请号 US19960759378 申请日期 1996.12.04
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 FUKUOKA, HIROFUMI;KONYA, YOSHIHARU;FUKUHIRA, MASANORI
分类号 C01B21/068;(IPC1-7):C01B21/068 主分类号 C01B21/068
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