| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to effectively remove the gases into which the harmful components generated during the production process of semiconductor devices are included by utilizing a burning device and an adsorption device and subjecting the inflammable harmful components to a primary treatment with the burning device, then subjecting these components to the adsorption treatment of the residual harmful components. SOLUTION: This gas scrubber has the burning device 1 which is supplied with the gases generated in the production process for the semiconductor devices through on induction pipe 13 into a box-shaped cabinet 3 having a door on its one lateral side and which functions to burn these gases and the adsorption device 2 which adsorbs the compsn. of the gases unburned by the burning device 1 and physically and chemically treats the adsorption components. The burning device 1 is constituted to burn the gases by the ceramic heaters built therein and to recover the sludge generated at this time into a storage vessel 7. The combustion gases are cooled by a cooler 44 which is disposed around the burning device 1 and uses cooling water during the time the gases are supplied from the burning device 1 to the adsorption device 2. |
