发明名称 |
ACCELEROMETER AND METHOD FOR MAKING SAME |
摘要 |
PCT No. PCT/FR96/01968 Sec. 371 Date Jul. 30, 1998 Sec. 102(e) Date Jul. 30, 1998 PCT Filed Dec. 10, 1996 PCT Pub. No. WO97/22010 PCT Pub. Date Jun. 19, 1997An accelerometer based on monocrystalline silicon. A moving mass is connected to a fixed frame by suspension arms. The sensor is produced in the stack of two silicon wafers in which stop and counter-stop functions are produced so as to limit the amplitude of the movements of the moving mass. |
申请公布号 |
EP0866972(A1) |
申请公布日期 |
1998.09.30 |
申请号 |
EP19960941729 |
申请日期 |
1996.12.10 |
申请人 |
SEXTANT AVIONIQUE |
发明人 |
LEFORT, OLIVIER;PEDRAZA-RAMOS, SYLVIE;PRESSET, RENE;GIROUD, PIERRE |
分类号 |
G01P15/08;G01P15/12;G01P15/13;G01P15/18;H01L29/84 |
主分类号 |
G01P15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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