发明名称
摘要 PURPOSE:To rapidly and easily complete the regulation of a substrate transfer path. CONSTITUTION:A magazine M is placed between regulating members 33, 34 used for regulating the magazine M which is provided substantially in series to guide members 17, 18 for guiding a base board L/F along a predetermined path, and after the regulating members 33, 34 each are relatively moved in the direction of approaching to each other to engage with the magazine M, both of them are synchronously moved in the same direction and then to perform the positioning of the magazine M with respect to a predetermined path. Successively, the base board L/F is projected from the magazine M between the guide members to bring both guide members close to the base board L/F, thereby completing the automatic regulation for the transfer path without troubling an operator.
申请公布号 JP2806725(B2) 申请公布日期 1998.09.30
申请号 JP19920351029 申请日期 1992.12.04
申请人 发明人
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址