发明名称 Method of forming a bump contact structure on a semiconductor device
摘要 A bump structure for bonding leads to a semi-conductor, in which the bump has a thin lower portion (32) which overlaps and seals the edges of the passivation layer (18), and a thicker upper or stem portion (38) of smaller lateral dimensions to fit within the margins of the opening in the passivation layer. Thus, during bonding, downward compressive forces are applied primarily through the bump stem directly to the metal termination pad (14) beneath the bump, and very little force is applied to the edges of the passivation layer. This reduces the likelihood of passivation layer cracking, increasing device reliability. Because the bump stem is formed within the margins of the passivation layer opening, it has a flat top, resulting in better lead bonding. <IMAGE>
申请公布号 EP0554019(B1) 申请公布日期 1998.09.30
申请号 EP19930300480 申请日期 1993.01.22
申请人 GENNUM CORPORATION 发明人 ERDOS, GEORGE
分类号 H01L21/60;H01L21/603;H01L23/485 主分类号 H01L21/60
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