Method for removing organic contaminants from a semiconductor surface

摘要

The purpose of the present invention is related to a method for removing organic contamination from a substrate. Said substrate can be a semiconductor surface. Said method can be applied for the removal of photoresist and organic post-etch residues from silicon surfaces. Said organic contamination can be a confined layer covering at least part of said substrate. Said confined layer can have a thickness in a range of submonolayer coverage to 1 mu m. Said method is applicable for either gasphase or liquid processes. <IMAGE>