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发明名称
摘要
申请公布号
JP2804913(B2)
申请公布日期
1998.09.30
申请号
JP19950319981
申请日期
1995.12.08
申请人
发明人
分类号
G01N27/62;H01J37/317;H01J49/06;H01J49/26;H01J49/28;H01J49/46;H05H3/06;(IPC1-7):H01J49/26
主分类号
G01N27/62
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代理人
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地址
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