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发明名称
摘要
申请公布号
JP2804526(B2)
申请公布日期
1998.09.30
申请号
JP19890185876
申请日期
1989.07.20
申请人
发明人
分类号
H01L21/336;H01L21/8238;H01L27/092;H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L21/336
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