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发明名称
ETCHING TERMINAL JUDGING METHOD
摘要
申请公布号
JPH10261622(A)
申请公布日期
1998.09.29
申请号
JP19970066098
申请日期
1997.03.19
申请人
HITACHI LTD;HITACHI TECHNO ENG CO LTD
发明人
YAMAZAKI HIDEKI;NISHIHATA KOJI;IKUHARA SHIYOUJI;TAWARA TETSUYA;OKIGUCHI MASASHI
分类号
C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
主权项
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