| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processor which can process a substrate in a state such that chemicals does not deteriorate and remains fresh, even after a replacement of chemicals. SOLUTION: In the case that a scheduled time for termination of chemicals replacement in a chemicals tub comes after a scheduled time for arrival of a 1st at the chemicals tub, a lot is started to be carried and processed. When the chemicals in the tub comes to the end of its life time, the chemicals is immediately replaced. On the other hand, in the case that the scheduled time for termination of the chemicals replacement comes before the scheduled time for arrival of a lot at the chemicals tub, a chemical replacement is delayed, such that the scheduled time for termination of chemical replacement may be the same as the scheduled time for the arrival of a lot at the tub. In either case, the lot can be carried into the chemicals the before the chemical replacement is finished, and therefore a substrate can be processed with a fresh chemicals just after the chemicals has been replaced. |
