| 摘要 |
PROBLEM TO BE SOLVED: To provide the laser repair device which can repair a defective pixel of the liquid crystal display with laser light in a spot smaller than the pixel. SOLUTION: This device is equipped with driving sources 7 and 8 which drive a work stage 4 in X, Y, andθdirections, a light source 44 for indication which emits indication light for indicating a defective pixel of the liquid crystal display 20, a laser device 25 which outputs the laser light for repairing defective pixel, a controller which calculates the coordinates of the defective pixel from the movement quantity of the work stage when the spot of the indication light is positioned at the defective pixel of the liquid crystal display, an image pickup optical system 28 which picks up an image of the defective pixel and sets the start coordinates of the laser light when the defective pixel is repaired, a 2nd driving source which drives the laser device and image pickup optical system in X, Y, and Z directions, and a controller which scans the defective pixel with a specific pattern according to the start coordinates set by the image pickup means.
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