发明名称 |
METHOD FOR CARRYING IN/OUT SAMPLE AND DEVICE SUPPORTING CARRY-IN/OUT OF SAMPLE |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method and device for carrying in and out a sample that can carry in a sample into a treatment room that is maintained in a vacuum atmosphere through a preliminary room in which pressure can be adjusted without causing a foreign object to be adhered to the sample and for example, can contribute to the realization of the local cleaning of a system for producing a mask that is used in a process for manufacturing a semiconductor device. SOLUTION: A container 24 for carrying a sample where a ventilation property is secured by a filter for eliminating dust/dirt is used, and a sample 23 is accommodated in the container 24 for carrying a sample in an atmosphere 22 that is maintained to be clean when carrying the sample 23 into a treatment room 7. After the container 24 for carrying the sample is carried into a preliminary room 3, the inside of the preliminary room 3 is evacuated to a vacuum atmosphere and then the sample 23 is taken out of the container 24 for carrying a sample and is carried into the treatment room 7.</p> |
申请公布号 |
JPH10261560(A) |
申请公布日期 |
1998.09.29 |
申请号 |
JP19970064472 |
申请日期 |
1997.03.18 |
申请人 |
TOSHIBA CORP |
发明人 |
YOSHITAKE HIDESUKE;TSUKUMO YOSHIAKI;TOJO TORU;KANDA MAKOTO;HIRANO RYOICHI;TADA YOSHIAKI |
分类号 |
G01N1/00;G03F1/76;G03F7/20;H01L21/027;H01L21/677;H01L21/68;(IPC1-7):H01L21/027;G03F1/08 |
主分类号 |
G01N1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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