PATTERN-DRAWING METHOD AND DEVICE,申请号JP19970064471-传众专利搜索

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发明名称	PATTERN-DRAWING METHOD AND DEVICE
摘要
申请公布号	JPH10261557(A)	申请公布日期	1998.09.29
申请号	JP19970064471	申请日期	1997.03.18
申请人	TOSHIBA CORP	发明人	TOKAWA IWAO;YAMAZAKI SATOSHI;ABE TAKAYUKI
分类号	H01L21/027;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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