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发明名称
METHOD AND APPARATUS FOR EVALUATING ELECTRICAL CHARACTERISTIC OF SEMICONDUCTOR DEVICE AND RECORDING MEDIUM READABLE BY COMPUTER WITH PROGRAM STORED FOR EVALUATING ELECTRICAL CHARACTERISTIC OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10261783(A)
申请公布日期
1998.09.29
申请号
JP19970063443
申请日期
1997.03.17
申请人
TOSHIBA CORP
发明人
SHIMANE TAKESHI
分类号
H01L21/66;G06F17/12;G06F17/50;H01L29/00;(IPC1-7):H01L29/00
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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