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发明名称
STAGE DEVICE, COORDINATE MEASURING DEVICE, AND POSITION MEASURING METHOD
摘要
申请公布号
JPH10260008(A)
申请公布日期
1998.09.29
申请号
JP19970066787
申请日期
1997.03.19
申请人
NIKON CORP
发明人
OOKUBO YUKIHARU
分类号
G01B11/00;G01B21/00;G12B5/00;(IPC1-7):G01B11/00
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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