RESIST APPLICATION DEVICE AND METHOD,申请号JP19970068001-传众专利搜索

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发明名称	RESIST APPLICATION DEVICE AND METHOD
摘要
申请公布号	JPH10261579(A)	申请公布日期	1998.09.29
申请号	JP19970068001	申请日期	1997.03.21
申请人	MATSUSHITA ELECTRON CORP	发明人	NAKAMURA TETSUYA
分类号	B05D1/40;B05C11/08;H01L21/027;(IPC1-7):H01L21/027	主分类号	B05D1/40
代理机构		代理人
主权项
地址

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