摘要 |
PROBLEM TO BE SOLVED: To provide a mold for press-forming optical element, improved in releasability from the optical element formed therein and durability, by implanting tantalum at least into the forming surface of the mold base material for pressing optical elements. SOLUTION: This mold for press-forming optical elements made of glass is obtained by implanting tantalum ions at least into the forming surface of the mold base material. The mold base material is preferably SiC for its heat resistance, thermal and electrical conductivity, and the like. It is preferable to implant the tantalum ions at 1×10<15> to 1×10<19> ions/cm<2> . It is also preferable to thermally treat the base material during or after the ion implantation. Another method for producing the mold involves formation of a tantalum film at least over the forming surface of the mold base material, into which the ions of He, Ar or the like are implanted. Still another method involves formation of a tantalum film at least over the forming surface of the mold base material and implantation of the ions of Ar or the like simultaneously. The mold allows the optical device formed therein to be released easily, and also allows these devices to be formed repeatedly, thereby greatly improving the productivity.
|