| 摘要 |
PROBLEM TO BE SOLVED: To provide a deformation mirror capable of enhancing a deformability and capable of reducing energy required for an elastic deformation. SOLUTION: The cross-sectional shape of a reference plane substrate 6 having a planar part 34 supporting a flexible member by being closely adhered to the outer peripheral part of the member and a surface part 3 forming a space permitting the elastic deformation of the flexible member in its inner side is formed with a curved line in which when the radius of a part in which an aberration is to be certainly compensated by generating a specific aberration, the radius of a part designed so as to generate the specific aberration, the radius of the deepest part of the curved part 3, the radius of a part transiting from the part 3 to the planar part 34 of peripheral part and the radius of the outer side of the planar part 34 are respectively defined as r1, r2, r3, r4 and r5, a part till r2 is formed with a sphericallity, a part from r1 to r3 is expressed with a function f (r), one inflection point exists in the interval from r1 to r3 and f" (r) becomes >0 in an r3 side from the inflection point. |
