| 摘要 |
PROBLEM TO BE SOLVED: To fully provide a substrate treating apparatus which prevents specified different treatments from being affected with each other by the other atmosphere. SOLUTION: A substrate treating apparatus has two treatment spaces A and B partitioned by a bulkhead 200 extending in vertical direction. Each treatment space A and B includes a plurality of stories. In the treatment space A, a plurality of treatment units to perform the treatment before exposure are arranged. In the treatment space A, a carry unit 11 is arranged, and in the treatment space B, a carry unit 21 is arranged. A delivery chamber SH is arranged covering the treatment chamber A and the treatment chamber B. In the delivery chamber SH, a delivery unit 31 which performs the delivery of a substrate with the carry unit 11 in the treatment space A, and the carry unit 21 in the treatment chamber B is provided. |
