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发明名称
PLASMA PROCESSOR
摘要
申请公布号
JPH10261631(A)
申请公布日期
1998.09.29
申请号
JP19970066704
申请日期
1997.03.19
申请人
TOSHIBA CORP
发明人
KATSUMATA RYUTA
分类号
H05H1/46;C23C16/50;C23F4/00;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):H01L21/31;H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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