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发明名称
Resist composition with radiation sensitive acid generator
摘要
申请公布号
SG52851(A1)
申请公布日期
1998.09.28
申请号
SG19960010825
申请日期
1996.10.07
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
BREYTA GREGORY;DIPIETRO RICHARD ANTHONY;HOFER DONALD CLIFFORD;ITO HIROSHI
分类号
G03F7/004;G03F7/039;H01L21/027;(IPC1-7):H01L21/312
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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