Method and device for delivering a pure gas charged with a predetermined quantity of at least one gaseous impurity to an apparatus

摘要

The system (1) which can measure traces of impurities in a gas, at very low concentrations includes an analyser (3) connected to a sampling branch (6) and an analysis branch (7). The sampling branch is connected to a supply line (8) which receives either a pure gas sample or a contaminated sample via the contamination device (9). The device includes a pure gas source, an impurity source (15) and a dilution module (16). The pure gas source includes a gas container (5) and an purification module (17) with a mass flow regulator (18). The dilution module is placed at the output of the purification module and includes several series stages (20-22).