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发明名称
SEMICONDUCTOR DEVICE AND FABRICATION THEREOF
摘要
申请公布号
JPH10256187(A)
申请公布日期
1998.09.25
申请号
JP19970081891
申请日期
1997.03.14
申请人
NIPPON STEEL CORP
发明人
YOSHIZAWA SHUNICHI
分类号
H01L21/28;H01L21/768;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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