发明名称 FORMING METHOD OF HIGH POLYMER LIGHT WAVEGUIDE PATTERN FOR APERTURE CONVERTING
摘要 PROBLEM TO BE SOLVED: To easily improve mass productivity, and facilitate connection with a light part by forming a pattern latent image by irradiating the light by forming a photosensitive substance in a layer shape in a part where a light waveguide is formed, forming a light waveguide pattern by removing a light unirradiated part by a solvent, and selecting this photosensitive substance from a group composed of a photosensitive oligomer and a photosensitive film. SOLUTION: A process (a) of forming a photosensitive substance in a layer shape in a part where a light waveguide is formed, a process (c) of forming a pattern latent image by irradiating the light to a prescribed part of the photosensitive substance and a process of removing the other part of a light unirradiated photosensitive substance by a solvent, are provided. A light waveguide pattern is formed by using a pattern latent image unformed part as a core part of the light waveguide. This photosensitive substance is selected from a group composed of a photosensitive oligomer and a photosensitive film. That is, a film is hardened by light irradiation, and is developed by a proper solvent, and the waveguide pattern having a sharp and smooth wall surface can be formed.
申请公布号 JPH10253845(A) 申请公布日期 1998.09.25
申请号 JP19970059437 申请日期 1997.03.13
申请人 NIPPON TELEGR & TELEPH CORP <NTT> 发明人 TOMARU AKIRA;IMAMURA SABURO;KURIHARA TAKASHI;HIKITA MAKOTO
分类号 G02B6/13;G02B6/12;(IPC1-7):G02B6/13 主分类号 G02B6/13
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